Semiconductor

In current manufacturing of MEMS-devices, available technologies are largely adopted from the semiconductor industry leading to a limited flexibility and favouring large production volumes of same device. Also, these methods are intended for planar surfaces, which is the case for Integrated Circuits (ICs), but not for MEMS. One of the limiting factors in these lines is the use of physical masks in lithography lines instead of digital masks. Currently only few MEMS devices used in consumer electronics are produced in such large volumes that they can fully utilize the savings potential from the production scale.

 

Key advantages of µPlasmaPrint

  • Local plasma treatment
  • Maskless
  • Based on digital information
  • Flexibility of processing gases
  • Wide variety of applications possible

Applications of µPlasmaPrint within the semiconductor industry

  • Wafer wettability and adhesion improvement
  • Local Cleaning
  • Deposition of hydrophobic material for improved fluid control
  • Underfill improvement
  • Self-aligment solutions

 

1App space

Plasma modification of surfaces through chemical modification and deposition.

Plasma Surface Modification

Where cells meet surfaces

Microfluidics, biosensors, regenerative medicine, tissue scaffolds

Biomed
Plasmas are finding applications in the expanding high-tech industry of organic electronics, such as for functionalising surfaces for organic photovoltaics or organic LEDs. The wettability of substrates can be altered
Printed electronics
In current manufacturing of MEMS-devices, available technologies are largely adopted from the semiconductor industry leading to a limited flexibility and favouring large production volumes of same device. Also, these methods
Semiconductor

1Company space

Contact us

InnoPhysics ... 
.... is an innovation driven company
.... commercializes its proprietary µPlasmaPrint technology

 

Contact details:

InnoPhysics B.V.
Fransebaan 592a
5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772

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InnoPhysics B.V.
Fransebaan 592a, 5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772
© 2017 InnoPhysics B.V.. All Rights Reserved.