Collaboration InnoPhysics & Eindhoven University of Technology in patterned plasma-assisted Atomic Layer Deposition and announcement new CSO

Eindhoven, the Netherlands – InnoPhysics B.V. and the Plasma & Materials Processing group (PMP) at the department of Applied Physics of the Eindhoven University of Technology (TU/e) are pleased to announce a collaboration in the field of patterned plasma-assisted atomic layer deposition (ALD). This collaboration is financially supported by the recently approved FOM-NWO KIEM-HTSM project “Combining micro-plasma printing and atomic layer deposition for patterned ultra-thin film preparation”, under the supervision of dr. M. Creatore (TU/e).

 

The aim of this collaboration is to combine the knowledge and expertise available in the academic group in the field of ALD with the µ-PlasmaPrint technology developed by InnoPhysics. Within this collaboration, the researchers will explore the potential of the µ-PlasmaPrinter technology toward ultra-thin film deposition at atmospheric pressure and low substrate temperature, devoting attention also to the improvement in spatial resolution of the deposited patterns.

The recent efforts of the two teams have allowed to integrate in the µ-PlasmaPrinter a precursor dosing head, enabling the printer to process thin film deposition in a cycle-wise fashion, where each cycle consists of alternating substrate exposures to a film growth precursor and to a (air, N2-fed) plasma step. The PMP group has also recently bought two systems from Innophysics to further explore the potential of µ-PlasmaPrint assisted ALD.

Moreover, InnoPhysics B.V. is pleased to announce prof. dr. ir. Erwin Kessels, the group leader of the PMP group and director of the NanoLab@TU/e, as their new chief scientific officer (CSO).

About InnoPhysics B.V.

InnoPhysics B.V. was founded in 2009 to commercialize the proprietary µ-PlasmaPrint technology. InnoPhysics specializes in the development and fabrication of plasma equipment used for local and patterned plasma treatment, both for activation and thin film deposition. For more information, please visit www.innophysics.com.

About  the Plasma & Materials Processing group (Applied Physics department, TU/e)

The Plasma and Materials Processing (PMP) research group (> 50 members), led by Prof. Erwin Kessels, focuses on the science and technology of plasma and materials processing. The scientific objective of the group is to obtain “atomic” level understanding of the interaction of plasma and gas phase species with materials. For more information, please visit http://www.phys.tue.nl/pmp/.

 

Contact

To learn more about this collaboration, please contact

dr. ir. Alquin Stevens 

Fransebaan 592a

5627 JM Eindhoven 

Office: +31 (0) 40 248 4774 

This email address is being protected from spambots. You need JavaScript enabled to view it. 

 

dr. M. Creatore

Den Dolech 2

5600 MB Eindhoven

Office: + 31 (0) 40 247 4223

This email address is being protected from spambots. You need JavaScript enabled to view it.

InnoPhysics joins REGMED XB

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KIEM HTSM funding for μPlasmaPrint assisted ALD

Within the pilot KIEM-HTSM, the FOM Foundation has awarded funding to the first two proposals for public-private collaboration projects with SMEs. Prof. Kessels and Dr. Creatore from the Plasma & Materials Processing group at the Eindhoven University of Technology have succesfullly applied for a KIEM HTSM grant entitled Combining micro-plasma printing and atomic layer deposition for patterned ultra-thin film preparation.
In this project

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Collaboration InnoPhysics & Eindhoven University of Technology in patterned plasma-assisted Atomic Layer Deposition and announcement new CSO

Eindhoven, the Netherlands – InnoPhysics B.V. and the Plasma & Materials Processing group (PMP) at the department of Applied Physics of the Eindhoven University of Technology (TU/e) are pleased to announce a collaboration in the field of patterned plasma-assisted atomic layer deposition (ALD). This collaboration is financially supported by the recently approved FOM-NWO KIEM-HTSM project “Combining micro-plasma printing and atomic layer deposition for patterned ultra-thin film preparation”, under the supervision of dr. M. Creatore (TU/e).

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Joint EuroCVD - Baltic ALD

Linköping, Sweden

Presentation title: "Towards selective plasma assisted ALD"

InnoPhysics will present their latest developments regarding the succesful introduction of atmospheric pressure µPlasmaPrint assisted Atomic Layer Deposition.

More information see http://www.eurocvd-balticald2017.se/

Abstract

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Workshop Nano Fabrication, Devices & Met …

Eindhoven, the Netherlands

Presentation title: "Towards selective plasma assisted ALD"

InnoPhysics will present their latest developments regarding the succesful introduction of atmospheric pressure µPlasmaPrint assisted Atomic Layer Deposition.

More information see http://visiondynamics.nl/

Abstract

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Workshop Nano Bio Surfaces & Interfaces …

Leuven, Belgium

Presentation title: "Towards selective plasma assisted ALD"

InnoPhysics will present their latest developments regarding the succesful introduction of atmospheric pressure µPlasmaPrint assisted Atomic Layer Deposition.

More information see http://visiondynamics.nl/

Abstract

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iPlasmaNano

Antwerp, Belgium

Presentation title: "Towards selective plasma assisted ALD"

InnoPhysics will present their latest developments regarding the succesful introduction of atmospheric pressure µPlasmaPrint assisted Atomic Layer Deposition.

More information see http://www.iplasmanano.org/

Abstract

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InnoPhysics ... 
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.... commercializes its proprietary µPlasmaPrint technology

 

Contact details:

InnoPhysics B.V.
Fransebaan 592a
5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772

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InnoPhysics B.V.
Fransebaan 592a, 5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772
© 2017 InnoPhysics B.V.. All Rights Reserved.