Parts & accessories

 

Standard µPlasmaPrint integration kit parts

includes:

24 electrode printhead

  • Electrode oscillation frequency: 0-400 Hz
  • 2 rows of 12 electrodes
  • Electrode tip diameter 50 µm
  • Electrode pitch 270 µm
mPPProducts 01 

 

 

Printhead driver electronics

  • 24 channel
  • adjustable trigger timing and pulse width
mPPProducts 07

 

Standard high voltage substrate carrier

  • approx. A4 size 
  • Different size possible
  • Glass base (flatness ± 10 µm)
  • PI/Cu laminate top
  • Optionally Glass/ITO top
mPPProducts 10 

 

High-voltage power supply and controller

  • 1-9 kV (Peak-to-peak)
  • Sine wave
  • Operates at resonance frequency 
  • Frequency 30-100 kHz
  • Nominal power: 100 W
  • Electrical input rating: 230 V AC, 50 Hz
mPPProducts 04mPPProducts 06

 

 

µPlasmaPrint Station:

includes:

Standard µPlasmaPrint integration kit  

 

XY-Z platform

  • Modified Roland Engraving machine
  • Speed 5-60 mm/s
  • Accuracy XY-axis: 20 µm.
  • Accuracy Z-axis: 10 µm.
  • Input rating: 240 V AC, 50 Hz
PlasmaPrinter 

 

LP50 integration modkit

includes:

Standard µPlasmaPrint integration kit  

 

Mechanical interface for the printhead

  • for mounting µPlasmaPrint head 
    in Pixdro LP50 platform
mPPProducts 12mPPProducts 11

Note: Contact Meyer Burger for the additional preparation of the LP50 platform necessary for µPlasmaPrint integration.  

 

Accessories

 

Standard gas flow nozzle

  • for use on dielectric substrates
  • gas in- & outlet
  • viewports for PlasmaView camera 
mPPProducts 02 

 

Special gas flow nozzle

  • for use on conductive substrates
  • gas in- & outlet
  • spacer insert with ceramic spacer
  • easy spacer exchange by magnetic
    spacer insert mounting
  • viewports for PlasmaView camera 
mPPProducts 03 

 

Fiducial alignment camera system

  • for aligned µPlasmaPrint at predefined positions
    on sample 
mPPProducts 08 

 

Inline plasmaview camera system

  • for inline visualization of plasma operation
mPPProducts 09 

 

Custom substrate carriers

 

6" wafer table

  • High voltage substrate table
  • Vacuum clamping 
mPPProducts 13 

 

200x200 mm copper-based substrate table

  • vacuum clamping by slits on all 4 sides 
  • custom vacuum clamping design posibble
mPPProducts 14 

 

 

Special power supplies 

 

HV pulse source  

1Product space

μPlasmaPrinting Station

μPlasmaPrint PiXDRO LP50 integration kit

µPlasmaPrint integration kit

Parts & accessories

µPlasmaPrint ALD add-on

Sampling service

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Contact us

InnoPhysics ... 
.... is an innovation driven company
.... commercializes its proprietary µPlasmaPrint technology

 

Contact details:

InnoPhysics B.V.
Fransebaan 592a
5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772

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InnoPhysics B.V.
Fransebaan 592a, 5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772
© 2017 InnoPhysics B.V.. All Rights Reserved.