µPlasmaPrint assisted ALD :: KIEM HTSM

Innophysics B.V. and the Plasma & Materials Processing group (PMP) at the department of Applied Physics of the Eindhoven University of Technology (TU/e) are pleased to announce a collaboration in the field of patterned plasma-assisted atomic layer deposition.

This collaboration is

supported by the recently approved FOM-NWO KIEM-HTSM project: "Combining µPlasmaPrinting and atomic layer deposition for patterned ultra-thin film preparation". In this project the combination of the µPlasmaPrinting techniques developed by Innophysics with atomic layer deposition (ALD) will be widely investigated at the TU/e. The ultimate goal is to deposit (ultra-)thin patterned high quality films with high level of control in terms of thickness, opto-electrical properties and patterning resolution. 

 

During this project, the PMP group intends to demonstrate:

1. Local plasma activation of surfaces by the µPlasmaPrinter followed by area selective ALD of transparant conductive oxide (TCO) films. This combination can lead to a fast, simple and low-cost approach for patterned TCOs, which are for example useful for plastic electronics.

2. Directly deposit metal oxides in an ALD-like approach by the use of a modified µPlasmaPrinter. This innovative approach is expected to deliver not only improved film properties, but also enhanced control of film thickness and patterning resolution.

1Project space

Innophysics B.V. and the Plasma Materials Processing group (PMP) at the department of Applied Physics of the Eindhoven University of Technology (TU/e) are pleased to announce a collaboration
µPlasmaPrint assisted ALD :: KIEM HTSM
InnoPhysics has joined RegMed XB to explore the application of µPlasmaPrint in the domain of regenerative medicine.
RegMed XB

Breakthrough in medical diagnostics tests through selective application of non-fouling hydrophilic coatings. A collaboration between Axxicon Moulds Eindhoven, Lipocoat (Enschede, NL) and InnoPhysics with financial support from MIT-Zuid.

 Molecular printer for biomed applications :: MIT-Zuid

Together with Nordson Asymtek in Deurne, the Netherlands, InnoPhysics is integrating the µPlasmaPrint solution in the Nordson Asymtek liquid dispensing platforms.

MicroFluidiCoat :: MRE

1Company space

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InnoPhysics ... 
.... is an innovation driven company
.... commercializes its proprietary µPlasmaPrint technology

 

Contact details:

InnoPhysics B.V.
Fransebaan 592a
5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772

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InnoPhysics B.V.
Fransebaan 592a, 5627 JM Eindhoven, the Netherlands
phone +31 (0) 40 248 4774
Chamber of commerce 17 19 4772
© 2017 InnoPhysics B.V.. All Rights Reserved.